Invention Grant
- Patent Title: Thin film transistor, organic EL light emitting device, and method of fabricating thin film transistor
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Application No.: US14034949Application Date: 2013-09-24
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Publication No.: US09620731B2Publication Date: 2017-04-11
- Inventor: Takaaki Ukeda , Akihito Miyamoto , Norishige Nanai
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC COPRORATION
- Current Assignee: PANASONIC COPRORATION
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2011-233305 20111024
- Main IPC: H01L51/52
- IPC: H01L51/52 ; H01L51/05 ; H01L29/51 ; H01L27/32 ; H01L29/66 ; H01L29/786

Abstract:
A thin film transistor according to the present disclosure including: a gate electrode above a substrate; a gate insulating layer covering the gate electrode; a semiconductor layer above the gate insulating layer; and a source electrode and a drain electrode which are above the gate insulating layer, and electrically connected to the semiconductor layer, in which the gate insulating layer includes a first area and a second area, the first area being above the gate electrode, the second area being different from an area above the gate electrode, and made of a same substance as the first area, and the first area has a higher density than a density of the second area.
Public/Granted literature
- US20140021457A1 THIN FILM TRANSISTOR, ORGANIC EL LIGHT EMITTING DEVICE, AND METHOD OF FABRICATING THIN FILM TRANSISTOR Public/Granted day:2014-01-23
Information query
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