Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus
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Application No.: US14061295Application Date: 2013-10-23
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Publication No.: US09622332B2Publication Date: 2017-04-11
- Inventor: Toru Suzuki , Hiroshi Tanaka , Hideyuki Hayashi , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2012-233553 20121023
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G06T7/20

Abstract:
In an extreme ultraviolet light generation apparatus, a target detection section may include a light source, a transfer optical system, an image sensor configured to output image data of an image that has been formed by irradiating a target outputted from a target supply device with light outputted from the light source on a light-receiving unit of the image sensor by the transfer optical system, and a processing unit, connected to the image sensor, configured to receive the image data, obtain a first optical intensity distribution along a first line that intersects with a trajectory of the target and a second optical intensity distribution along a second line that intersects with the trajectory, calculate a center of gravity position in the first optical intensity distribution and a center of gravity position in the second optical intensity distribution, and calculate an actual path of the target based on the calculated positions.
Public/Granted literature
- US20140111635A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2014-04-24
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