Invention Grant
- Patent Title: Production method for transparent conductive film
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Application No.: US14761193Application Date: 2014-01-15
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Publication No.: US09624573B2Publication Date: 2017-04-18
- Inventor: Kazuaki Sasa , Yusuke Yamamoto , Hironobu Machinaga
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Ibaraki-shi
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Ibaraki-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2013-005497 20130116; JP2014-003950 20140114
- International Application: PCT/JP2014/050600 WO 20140115
- International Announcement: WO2014/112536 WO 20140724
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/35 ; C23C14/58 ; C23C14/08 ; C23C14/54 ; H01J37/34 ; H01J37/32 ; H01L31/18

Abstract:
A method for producing a transparent conductive film includes: forming a transparent conductive coating on at least one surface of an organic polymer film substrate in the presence of inert gas by RF superimposed DC sputtering deposition using an indium-based complex oxide target with a high horizontal magnetic field of 85 to 200 mT at a surface of the target in a roll-to-roll system, wherein the indium-based complex oxide target has a content of a tetravalent metal element oxide of 7 to 15% by weight as calculated by the formula {(the amount of the tetravalent metal element oxide)/(the amount of the tetravalent metal element oxide+the amount of indium oxide)}×100(%), wherein the transparent conductive coating has a thickness in the range of 10 to 40 nm, and the transparent conductive coating has a specific resistance of 1.3×10−4 to 2.8×10−4 Ω·cm.
Public/Granted literature
- US20160024644A1 PRODUCTION METHOD FOR TRANSPARENT CONDUCTIVE FILM Public/Granted day:2016-01-28
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