Invention Grant
- Patent Title: Thin film deposition apparatus, deposition method using the same, and method of manufacturing organic light-emitting display apparatus by using the apparatus
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Application No.: US14262088Application Date: 2014-04-25
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Publication No.: US09624575B2Publication Date: 2017-04-18
- Inventor: Ung-Soo Lee , Jin-Woo Park , Su-Hyuk Choi
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0088270 20130725
- Main IPC: H01L23/10
- IPC: H01L23/10 ; H01L23/12 ; C23C14/50 ; C23C14/34 ; H01L51/56 ; H01L51/00 ; H01J37/34 ; H01L21/687 ; H01J37/32
Abstract:
A thin film deposition apparatus, a deposition method using the same, and a method of manufacturing an organic light-emitting display apparatus by using the apparatus are provided. A thin film deposition apparatus is provided that includes a chamber containing a substrate holder on which a substrate is mounted, a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder, and a target unit that supplies a thin film material for formation on the substrate.
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