Invention Grant
- Patent Title: Photolithography on shrink film
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Application No.: US13481653Application Date: 2012-05-25
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Publication No.: US09625819B2Publication Date: 2017-04-18
- Inventor: Michelle Khine , Shreshta Jayadev
- Applicant: Michelle Khine , Shreshta Jayadev
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Foley & Lardner LLP
- Agent Antoinette F. Konski; Lydia Choi
- Main IPC: G01B11/04
- IPC: G01B11/04 ; G03F7/20 ; G03F7/00

Abstract:
Provided are methods of preparing a plurality of extrusions, comprising (a) shrinking a transparent first thermoplastic material comprising a plurality of non-transparent marks, (b) lithographically transferring the pattern of the shrunk non-transparent marks to a layer of photoresist deposited on a second thermoplastic material, and (c) shrinking the second thermoplastic material, thereby generating a plurality of extrusions on the shrunk second thermoplastic material.
Public/Granted literature
- US20130101795A1 PHOTOLITHOGRAPHY ON SHRINK FILM Public/Granted day:2013-04-25
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