Invention Grant
- Patent Title: Planar motor system with increased efficiency
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Application No.: US14432912Application Date: 2013-09-27
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Publication No.: US09625832B2Publication Date: 2017-04-18
- Inventor: J. Casey Donaher , Craig Simpson , Peter John Gerard Dufault
- Applicant: Rudolph Technologies, Inc.
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Chiesa Shahinian & Giantomasi PC
- International Application: PCT/US2013/062099 WO 20130927
- International Announcement: WO2014/055335 WO 20140410
- Main IPC: H02K41/02
- IPC: H02K41/02 ; G03F7/20 ; H02K41/03

Abstract:
A planar motor system comprises a platen with a first planar motor component and a stage with a second planar motor component. The stage can move along a first cardinal axis or a second cardinal axis. The planar motor system further comprises a drive system. When the drive system is energized in a first drive configuration, it applies a first force and a second force. The first force and the second force are not parallel to any cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis. When the drive system is energized in a second drive configuration, it applies a third force and a fourth force. The third force and the fourth force are not parallel to any cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis.
Public/Granted literature
- US20150309425A1 Planar Motor System With Increased Efficiency Public/Granted day:2015-10-29
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