Invention Grant
- Patent Title: Semiconductor device including air gaps and method of fabricating the same
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Application No.: US15142885Application Date: 2016-04-29
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Publication No.: US09627253B2Publication Date: 2017-04-18
- Inventor: Min-Ho Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2015-0008562 20150119
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/764 ; H01L21/311 ; H01L21/762 ; H01L23/522 ; H01L27/108 ; H01L27/24 ; H01L23/532 ; H01L23/528 ; H01L23/535 ; H01L29/423 ; H01L23/48

Abstract:
A semiconductor device including air gaps and a method of fabricating the same. The semiconductor device in accordance with an embodiment may include a bit line structure having a bit line formed over a first contact plug, a second contact plug formed adjacent to the first contact plug and the bit line structure, an air gap structure comprising two or more air gaps to surround the second contact plug and have an outer sidewall in contact with the bit line structure, and one or more capping support layers separating the air gaps, a third contact plug capping a part of the air gap structure and being formed over the second contact plug, and a capping layer for capping a remainder of the air gap structure.
Public/Granted literature
- US20160247711A1 SEMICONDUCTOR DEVICE INCLUDING AIR GAPS AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-08-25
Information query
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