Invention Grant
- Patent Title: Workpiece cutting method using dummy wafer to determine condition of cutting blade
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Application No.: US15077423Application Date: 2016-03-22
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Publication No.: US09627260B2Publication Date: 2017-04-18
- Inventor: Kazuma Sekiya
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2015-059571 20150323
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/66 ; B23Q17/09 ; H01L21/304 ; B28D5/00 ; B28D5/02

Abstract:
A workpiece cutting method of cutting a workpiece having a front side on which a plurality of crossing division lines are formed to define a plurality of separate regions where a plurality of devices are each formed is disclosed. The workpiece cutting method includes a workpiece cutting step of cutting the workpiece held on a first chuck table along the division lines by using a cutting blade, a dummy wafer cutting step of cutting a dummy wafer held on a second chuck table by using the cutting blade, a dummy wafer imaging step of imaging a cut groove formed on the dummy wafer in the dummy wafer cutting step, by using an imaging unit to thereby obtain a detected image, and a determining step of determining the condition of the cutting blade from the condition of chippings formed on both sides of the cut groove in the detected image.
Public/Granted literature
- US20160284611A1 WORKPIECE CUTTING METHOD Public/Granted day:2016-09-29
Information query
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