Invention Grant
- Patent Title: Thinning in package using separation structure as stop
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Application No.: US14058213Application Date: 2013-10-18
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Publication No.: US09627287B2Publication Date: 2017-04-18
- Inventor: Manfred Engelhardt , Edward Fuergut , Hannes Eder
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L23/28 ; H01L21/78 ; H01L21/56 ; H01L23/31

Abstract:
A method of forming a thinned encapsulated chip structure, wherein the method comprises providing a separation structure arranged within an electronic chip, encapsulating part of the electronic chip by an encapsulating structure, and thinning selectively the electronic chip partially encapsulated by the encapsulating structure so that the encapsulating structure remains with a larger thickness than the thinned electronic chip, wherein the separation structure functions as a thinning stop.
Public/Granted literature
- US20150108666A1 Thinning in package using separation structure as stop Public/Granted day:2015-04-23
Information query
IPC分类: