Invention Grant
- Patent Title: Field effect transistor with non-doped channel
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Application No.: US14458495Application Date: 2014-08-13
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Publication No.: US09627512B2Publication Date: 2017-04-18
- Inventor: Tung-Wen Cheng , Chang-Yin Chen , Che-Cheng Chang , Mu-Tsang Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agent Chun-Ming Shih
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/08 ; H01L29/78 ; H01L29/10 ; H01L21/8238 ; H01L29/51

Abstract:
Some embodiments of the present disclosure provide a semiconductor structure, including a substrate having a top surface; a first doped region in proximity to the top surface; a non-doped region positioned in proximity to the top surface and adjacent to the first doped region, having a first width; a metal gate positioned over the non-doped region and over a portion of the first doped region, having a second width. The first width is smaller than the second width, and material constituting the non-doped region is different from material constituting the substrate.
Public/Granted literature
- US20160049498A1 FIELD EFFECT TRANSISTOR WITH NON-DOPED CHANNEL Public/Granted day:2016-02-18
Information query
IPC分类: