Invention Grant
- Patent Title: Method of manufacturing a magnetic memory device
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Application No.: US14821763Application Date: 2015-08-09
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Publication No.: US09627609B2Publication Date: 2017-04-18
- Inventor: Dae Eun Jeong
- Applicant: Dae Eun Jeong
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2014-0175196 20141208
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L43/08 ; H01L43/10 ; H01L27/22

Abstract:
A method of manufacturing a magnetic memory device may include forming a lower magnetic layer, a tunnel barrier layer, and an upper magnetic layer on a substrate, forming a magnetic tunnel junction pattern by etching a stacked structure including the lower magnetic layer, the tunnel barrier layer, and the upper magnetic layer, forming a boron-absorption layer covering the magnetic tunnel junction pattern, and performing a heat treatment process so that boron included in the upper and lower magnetic layers may be absorbed by the boron-absorption layer. The heat treatment process may be undertaken in a gaseous atmosphere including at least one of hydrogen, oxygen, and nitrogen.
Public/Granted literature
- US20160163971A1 METHOD OF MANUFACTURING A MAGNETIC MEMORY DEVICE Public/Granted day:2016-06-09
Information query
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