Invention Grant
- Patent Title: Thin film forming apparatus and thin film forming method using the same
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Application No.: US14605965Application Date: 2015-01-26
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Publication No.: US09627619B2Publication Date: 2017-04-18
- Inventor: Duckjung Lee , Jiyoung Choung , Kyuhwan Hwang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2014-0117027 20140903
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/00 ; C23C14/04 ; C23C14/28 ; H01L51/50
Abstract:
A thin film forming apparatus includes: a thin film source including a thin film on one surface of the thin film source to be transferred to a substrate; and a light emitter configured to apply light energy to the thin film source to transfer the thin film to the substrate.
Public/Granted literature
- US20160064670A1 THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD USING THE SAME Public/Granted day:2016-03-03
Information query
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