Invention Grant
- Patent Title: Back cavity leakage test for acoustic sensor
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Application No.: US14149708Application Date: 2014-01-07
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Publication No.: US09628929B2Publication Date: 2017-04-18
- Inventor: James Christian Salvia , Baris Cagdaser , Aleksey S. Khenkin
- Applicant: Invensense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Klintworth & Rozenblat IP LLC
- Agent Maryam Imam
- Main IPC: H04R29/00
- IPC: H04R29/00 ; H04R19/00
Abstract:
An acoustic sensor system has an acoustic sensor with a cavity, a cavity leakage, and a cavity pressure. The acoustic sensor system further has a test controller coupled to the acoustic sensor that causes a change in the cavity pressure. A response of the acoustic sensor to the change in the cavity pressure is used to measure the cavity leakage.
Public/Granted literature
- US20150195665A1 BACK CAVITY LEAKAGE TEST FOR ACOUSTIC SENSOR Public/Granted day:2015-07-09
Information query
