Invention Grant
- Patent Title: Elevator linear motor drive
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Application No.: US14477783Application Date: 2014-09-04
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Publication No.: US09633880B2Publication Date: 2017-04-25
- Inventor: Stuart Scollay
- Applicant: Intevac, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: INTEVAC, INC.
- Current Assignee: INTEVAC, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Womble Carlyle Sandridge & Rice LLP
- Agent Joseph Bach, Esq.
- Main IPC: H01L21/677
- IPC: H01L21/677 ; G11B5/84 ; H01L21/673

Abstract:
Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.
Public/Granted literature
- US20140377040A1 ELEVATOR LINEAR MOTOR DRIVE Public/Granted day:2014-12-25
Information query
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