Invention Grant
- Patent Title: Method for patterning a graphene layer and method for manufacturing a display substrate
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Application No.: US14513324Application Date: 2014-10-14
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Publication No.: US09633899B2Publication Date: 2017-04-25
- Inventor: Shi Shu , Zhijun Lv , Jingxia Gu , Yue Shi , Fangzhen Zhang , Bing Sun , Chuanxiang Xu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410256945 20140610
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/3205 ; H01L23/498 ; H05K3/06 ; H01L21/308

Abstract:
The invention provides a method for patterning a graphene layer and a method for manufacturing a display substrate. The method for patterning a graphene layer comprises: forming an isolation layer on a graphene layer; forming a photoresist layer on the isolation layer; patterning the photoresist layer; etching the isolation layer according to the patterned photoresist layer to form a patterned isolation layer; etching the graphene layer according to the patterned photoresist layer to form a patterned graphene layer; and removing the patterned isolation layer. In the method of the invention, the unfavorable condition of the prior art may be avoided that a graphene film sloughs off or a photoresist remains on a graphene film when a photoresist material is peeled off, and the product yield can be improved in the case that the production cost is controlled.
Public/Granted literature
- US20150357239A1 METHOD FOR PATTERNING A GRAPHENE LAYER AND METHOD FOR MANUFACTURING A DISPLAY SUBSTRATE Public/Granted day:2015-12-10
Information query
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