Invention Grant
- Patent Title: Method of manufacturing display panel
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Application No.: US14413161Application Date: 2014-01-24
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Publication No.: US09634121B2Publication Date: 2017-04-25
- Inventor: Tianming Dai
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD
- Current Assignee Address: CN Shenzhen
- Priority: CN201410023841 20140117
- International Application: PCT/CN2014/071425 WO 20140124
- International Announcement: WO2015/106465 WO 20150723
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/15 ; H01L29/66 ; H01L29/786 ; H01L27/12

Abstract:
A method of manufacturing a display panel having a plurality of lightly doped drain thin film transistors arranged as a matrix includes forming a semiconductor pattern with a predetermined shape on a substrate; forming a dielectric layer covering the semiconductor pattern on the substrate; forming a metal layer on the dielectric layer; forming a photoresist patterns smaller than the semiconductor pattern on the metal layer above the semiconductor pattern; etching the metal layer to form a gate electrode smaller than the photoresist pattern; doping high concentration ions by using the photoresist pattern as a mask to form a pair of highly doped regions on the semiconductor pattern not covered by the photoresist pattern; removing the photoresist pattern; and doping low concentration ions by using the gate electrode as a mask to form a pair of lightly doped regions between the highly doped regions and a part of the semiconductor pattern.
Public/Granted literature
- US20160315173A1 METHOD OF MANUFACTURING DISPLAY PANEL Public/Granted day:2016-10-27
Information query
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