Vacuum cleaning device
Abstract:
This vacuum cleaning device is provided with: a vapor chamber in which vapor of a hydrocarbon-based cleaning agent is generated; a condensation chamber; a first heat exchanger in which heat exchange between the vapor and a heating medium is carried out; a cleaning chamber in which a workpiece can be cleaned under vacuum by the condensed cleaning agent that has been generated in the condensation chamber; a compressor that adiabatically compresses and further heats the heating medium that was heated by the first heat exchanger; a second heat exchanger that carries out heat exchange between the heating medium heated by the compressor and the hydrocarbon-based cleaning agent in the vapor chamber; and a vacuum unit that further cools the heating medium that has been cooled by the second heat exchanger by forcing vacuum expansion of the heating medium. The heating medium cycles through the first heat exchanger, the compressor, the second heat exchanger, and the vacuum unit by the heating medium cooled by the vacuum unit being returned to the first heat exchanger.
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