Invention Grant
- Patent Title: Method for producing a microelectromechanical transducer
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Application No.: US14909105Application Date: 2014-07-02
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Publication No.: US09637379B2Publication Date: 2017-05-02
- Inventor: Marcel Giesen , Thomas Metzger , Phillip Ekkels , Ansgar Schäufele
- Applicant: EPCOS AG
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Priority: DE102013108464 20130806
- International Application: PCT/EP2014/064099 WO 20140702
- International Announcement: WO2015/018571 WO 20150212
- Main IPC: B81C1/00
- IPC: B81C1/00 ; G01L9/00 ; H04R31/00 ; B81C99/00

Abstract:
A method can be used for producing a microelectromechanical transducer. A plurality of microelectromechanical transducers are produced on a single wafer. Each transducer includes a diaphragm. The wafer is divided into at least a first and a second region. The mechanical tensions of a random sample of diaphragms of the first region are established and the values are compared with a predetermined desired value. The mechanical tensions of a random sample of diaphragms of the second region are established and the values are compared with the predetermined desired value. The tensions of the diaphragms in the first region are adjusted to the predetermined desired value, and the tensions of the diaphragms in the second region are adjusted to the predetermined desired value.
Public/Granted literature
- US20160167960A1 Method for Producing a Microelectromechanical Transducer Public/Granted day:2016-06-16
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