Invention Grant
- Patent Title: Mask assembly, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus
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Application No.: US14849916Application Date: 2015-09-10
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Publication No.: US09637816B2Publication Date: 2017-05-02
- Inventor: Jaesik Kim , Wooyong Sung , Duckjung Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2014-0141193 20141017
- Main IPC: H01L21/31
- IPC: H01L21/31 ; C23C14/04 ; H01L51/00 ; H01L51/56
Abstract:
Provided are a mask assembly, an apparatus for manufacturing a display apparatus, and a method of manufacturing the display apparatus. The mask assembly includes a mask comprising an opening having a pattern; and a self-assembled monolayer (SAM) that is coated on at least a portion of the mask.
Public/Granted literature
Information query
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