Invention Grant
- Patent Title: Process roller for receiving and guiding substrates in strip form in vacuum coating installations
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Application No.: US14377440Application Date: 2013-02-11
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Publication No.: US09637817B2Publication Date: 2017-05-02
- Inventor: Lutz Köhler , Daniel Michel , Anthony Nobel , Marco Grafe
- Applicant: FHR Anlagenbau GmbH
- Applicant Address: DE Ottendorf-Okrilla
- Assignee: FHR Anlagenbau GmbH
- Current Assignee: FHR Anlagenbau GmbH
- Current Assignee Address: DE Ottendorf-Okrilla
- Agency: DASCENZO Intellectual Property Law, P.C.
- Priority: DE102012202086 20120213
- International Application: PCT/EP2013/052697 WO 20130211
- International Announcement: WO2013/120809 WO 20130822
- Main IPC: C23C14/56
- IPC: C23C14/56 ; C23C16/02 ; C23C16/46 ; C23C14/54 ; C23C16/54

Abstract:
A process roller for receiving and guiding substrates in strip form in vacuum coating installations. The process roller comprises a heater located inside the process roller, in the form of an elongated radiant heater, and also a cylindrical lateral surface for receiving a substrate in strip form, the process roller being mounted rotatably about an axis of rotation in a vacuum process chamber. A particularly uniform temperature distribution can be achieved on the process roller's lateral surface by the process roller (2) being configured in a vacuum-tight manner, by the lateral surface (3) of the process roller (2) being connected in a vacuum-tight manner to two end caps (4, 5), which have a flattened, outwardly curved hemispherical form, by the interior space of the process roller (2) being connected to a vacuum connection (6), and by the radiant heater (8) extending into the region of the end caps (4, 5).
Public/Granted literature
- US20150122179A1 PROCESS ROLLER FOR RECEIVING AND GUIDING SUBSTRATES IN STRIP FORM IN VACUUM COATING INSTALLATIONS Public/Granted day:2015-05-07
Information query
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