Invention Grant
- Patent Title: Implant region definition
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Application No.: US14804294Application Date: 2015-07-20
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Publication No.: US09637818B2Publication Date: 2017-05-02
- Inventor: Juing-Yi Wu , Jyh-Kang Ting , Tsung-Chieh Tsai , Liang-Yao Lee
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C23C16/04 ; C23C16/455 ; C23C16/50 ; C23C14/22 ; C23C14/04 ; H01L21/8234 ; H01L21/8238 ; H01L21/265 ; H01L29/36 ; H01L27/02

Abstract:
Among other things, one or more systems and techniques for defining one or more implant regions or for doping a semiconductor arrangement are provided. A first implant region is defined based upon a first implant mask overlaying a first active region of a semiconductor arrangement. A second implant region is defined based upon the first implant mask and a second implant mask overlaying a second active region of the semiconductor arrangement. A third implant region is defined based upon the second implant mask overlaying a third active region of the semiconductor arrangement. One or more doping processes are performed through the first implant mask and the second implant mask to dope the semiconductor arrangement. Because the first implant mask and the second implant mask overlap the second active region, doping area coverage is improved thus mitigating undesirable voltage threshold variations otherwise resulting from inadequate doping area coverage.
Public/Granted literature
- US20150322565A1 IMPLANT REGION DEFINITION Public/Granted day:2015-11-12
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