Invention Grant
- Patent Title: Multi-rotation epitaxial growth apparatus and reactors incorporating same
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Application No.: US12900655Application Date: 2010-10-08
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Publication No.: US09637822B2Publication Date: 2017-05-02
- Inventor: Michael John Bergmann , David Todd Emerson , David Dean Seibel
- Applicant: Michael John Bergmann , David Todd Emerson , David Dean Seibel
- Applicant Address: US NC Durham
- Assignee: Cree, Inc.
- Current Assignee: Cree, Inc.
- Current Assignee Address: US NC Durham
- Agency: Myers Bigel, P.A.
- Main IPC: C30B25/12
- IPC: C30B25/12 ; C23C16/458 ; H01L21/687

Abstract:
A susceptor apparatus for use in a CVD reactor includes a main platter with a central gear. The main platter has opposite first and second sides, a central recess formed in the second side, and a plurality of circumferentially spaced-apart pockets formed in the first side. The central gear is positioned within the central recess and the satellite platters are individually rotatable within the respective pockets. Each pocket has a peripheral wall with an opening in communication with the central recess. The central gear teeth extend into each of the pockets via the respective wall openings and engage a planet gear associated with each satellite platter. Rotation of the main platter about its rotational axis causes the satellite platters to rotate about their individual rotational axes.
Public/Granted literature
- US20110083602A1 Multi-Rotation Epitaxial Growth Apparatus and Reactors Incorporating Same Public/Granted day:2011-04-14
Information query
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