Invention Grant
- Patent Title: Susceptor
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Application No.: US13593709Application Date: 2012-08-24
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Publication No.: US09638376B2Publication Date: 2017-05-02
- Inventor: Ju Jin Kang , Young Su Ku
- Applicant: Ju Jin Kang , Young Su Ku
- Applicant Address: KR Gumi-Si
- Assignee: LG Siltron Inc.
- Current Assignee: LG Siltron Inc.
- Current Assignee Address: KR Gumi-Si
- Agency: KED & Associates, LLP
- Priority: KR10-2011-0085750 20110826; KR10-2012-0004218 20120113
- Main IPC: H05B6/64
- IPC: H05B6/64 ; H05B6/10 ; H01L21/302 ; F17D3/00 ; H05B6/80 ; C23C16/458

Abstract:
A susceptor includes a first body including a plurality of first holes and a second body including a plurality of second holes. According to one arrangement, the second body is spaced from the first body to form a gap which allows a gas to pass from the second holes to the first holes. According to this or another arrangement, the first body is removably or rotatably coupled to the second body, or both. Rotation of the second body by a first amount or in a first direction brings at least one first hole in alignment with at least one second hole. And, rotation of the second body by a second amount or in a second direction causes a misalignment to occur between these holes.
Public/Granted literature
- US20130048629A1 SUSCEPTOR Public/Granted day:2013-02-28
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