Invention Grant
- Patent Title: Optical position-measuring device
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Application No.: US14975880Application Date: 2015-12-21
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Publication No.: US09638514B2Publication Date: 2017-05-02
- Inventor: Walter Huber
- Applicant: DR. JOHANNES HEIDENHAIN GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Traunreut
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE102015200293 20150113
- Main IPC: G01D5/347
- IPC: G01D5/347 ; G01B11/14 ; G01D5/26 ; G01B11/00

Abstract:
An optical position-measuring device senses a relative position of two objects. A reflection material measure is connected to one object and a scanning unit is connected to the other object. A beam is split into three sub-beams in a first splitting plane by a first splitting element. The first and third sub-beams are deflected toward the reflection material measure by the deflecting elements, while the second sub-beam is split into fourth and fifth sub-beams by a second splitting element. The first and fourth sub-beams propagate as a first pair of superimposed sub-beams and the third and fifth sub-beams propagate as a second pair of superimposed sub-beams. The first and second pairs of superimposed sub-beams, after being reflected by the reflection material measure, propagate respectively toward detectors, where the sub-beams in each pair are brought into interfering superposition, so that the detectors detect displacement-dependent scanning signals.
Public/Granted literature
- US20160202041A1 OPTICAL POSITION-MEASURING DEVICE Public/Granted day:2016-07-14
Information query
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