Invention Grant
- Patent Title: Calibration method and flow rate measurement method for flow rate controller for gas supply device
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Application No.: US13813219Application Date: 2011-06-28
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Publication No.: US09638560B2Publication Date: 2017-05-02
- Inventor: Masaaki Nagase , Nobukazu Ikeda , Yohei Sawada , Tooru Hirai , Kazuyuki Morisaki , Kouji Nishino , Ryousuke Dohi
- Applicant: Masaaki Nagase , Nobukazu Ikeda , Yohei Sawada , Tooru Hirai , Kazuyuki Morisaki , Kouji Nishino , Ryousuke Dohi
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Griffin and Szipl PC
- Priority: JP2010-171626 20100730
- International Application: PCT/JP2011/003679 WO 20110628
- International Announcement: WO2012/014375 WO 20120202
- Main IPC: G01F1/34
- IPC: G01F1/34 ; G01F7/00 ; G01F15/00 ; G01F25/00 ; G05D7/06

Abstract:
In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.
Public/Granted literature
- US20130186471A1 CALIBRATION METHOD AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE CONTROLLER FOR GAS SUPPLY DEVICE Public/Granted day:2013-07-25
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