Invention Grant
- Patent Title: MEMS-microviscometer
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Application No.: US13921515Application Date: 2013-06-19
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Publication No.: US09638617B2Publication Date: 2017-05-02
- Inventor: Mario Birkholz , Jurgen Drews , Karl-Ernst Ehwald , Dieter Genschow , Ulrich Haak , Philip Kulse , Egbert Matthus , Katrin Schulz , Wolfgang Winkler , Dirk Wolansky , Marlen Frohlich
- Applicant: IHP GmbH
- Applicant Address: DE Frankfurt
- Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
- Current Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ-INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
- Current Assignee Address: DE Frankfurt
- Agency: Ware, Fressola, Maguire & Barber LLP
- Priority: DE102012210470 20120621
- Main IPC: G01N11/00
- IPC: G01N11/00 ; G01N11/16

Abstract:
Micro-electromechanical device for measuring the viscosity of a fluid, comprises a measuring chamber with a micromechanical actuator, arranged as a cantilever above a metallically conductive counter electrode, elastically deformable towards the counter electrode, surrounded by the fluid to be measured and made of a metallically conductive material, a two-terminal RF voltage source that can be switched off, having a first output terminal connected to the actuator, and a second output terminal connected to the counter electrode, and which is designed to output an RF voltage signal that is suitable for deflecting the actuator out of its rest position, and a measuring device to detect a change in the frequency, amplitude or phase of the RF signal in order to determine a measurement value for the viscosity-dependent speed at which the actuator is deformed.
Public/Granted literature
- US20140000344A1 MEMS-Microviscometer Public/Granted day:2014-01-02
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