Invention Grant
- Patent Title: Particulate contamination measurement method and apparatus
-
Application No.: US14389075Application Date: 2013-03-28
-
Publication No.: US09638643B2Publication Date: 2017-05-02
- Inventor: Antonius Martinus Cornelis Petrus De Jong , Jacques Cor Johan Van Der Donck
- Applicant: ASML Netherlands B.V. , TNO
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2013/056794 WO 20130328
- International Announcement: WO2013/149961 WO 20131010
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/94 ; G03F7/20 ; G03F1/82 ; B32B37/24 ; B32B38/10 ; G01N21/956 ; G01N21/47 ; G01N1/02 ; G01N1/28

Abstract:
A particulate contamination measurement method and apparatus are discussed. The method, for example, comprises pressing a measurement surface (5) of a polyurethane elastomer (2) against a surface (7) to be measured, removing the polyurethane elastomer from the surface without leaving residues, then using an optical apparatus (11) to detect particles (8) which have been removed by the polyurethane elastomer from the surface and which have become attached to the polyurethane elastomer.
Public/Granted literature
- US20150055127A1 Particulate Contamination Measurement Method and Apparatus Public/Granted day:2015-02-26
Information query