Invention Grant
- Patent Title: Nanowire field-effect sensor including nanowires having network structure and fabrication method thereof
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Application No.: US15053109Application Date: 2016-02-25
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Publication No.: US09638659B2Publication Date: 2017-05-02
- Inventor: Jeong Soo Lee , Chan Oh Park , Dong Hoon Kim , Ki Hyun Kim
- Applicant: POSTECH ACADEMY-INDUSTRY FOUNDATION
- Applicant Address: KR Pohang-si, Gyeongsangbuk-Do
- Assignee: POSTECH ACADEMY-INDUSTRY FOUNDATION
- Current Assignee: POSTECH ACADEMY-INDUSTRY FOUNDATION
- Current Assignee Address: KR Pohang-si, Gyeongsangbuk-Do
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2015-0027608 20150226
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L21/265 ; H01L29/06 ; H01L29/423

Abstract:
Disclosed herein is a technology for fabricating a nanowire field-effect sensor, in which a bulk silicon substrate is used so that the fabrication cost of the sensor can be reduced while the integration density of the sensor can be increased. In addition, the nanowire field-effect sensor includes a nano-network having a network structure in which pins are vertically arranged on the sidewalls of the network, respectively, and a gate insulating layer is applied to the pins. Due to this nano-network, the detection area of the sensor can be increased to increase its sensitivity, and the structural stability of the sensor can be ensured.
Public/Granted literature
- US20160252478A1 NANOWIRE FIELD-EFFECT SENSOR INCLUDING NANOWIRES HAVING NETWORK STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2016-09-01
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