Invention Grant
- Patent Title: Method for producing a nanoporous layer on a substrate
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Application No.: US14436301Application Date: 2013-10-04
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Publication No.: US09638693B2Publication Date: 2017-05-02
- Inventor: Bernhard Wolfrum , Alexey Yakushenko , Andreas Offenhaeusser , Dirk Mayer
- Applicant: FORSCHUNGSZENTRUM JUELICH GMBH
- Applicant Address: DE Juelich
- Assignee: FORSCHUNGSZENTRUM JUELICH GMBH
- Current Assignee: FORSCHUNGSZENTRUM JUELICH GMBH
- Current Assignee Address: DE Juelich
- Agency: Norris McLaughlin & Marcus, P.A.
- Priority: DE102012021222 20121027
- International Application: PCT/DE2013/000567 WO 20131004
- International Announcement: WO2014/063670 WO 20140501
- Main IPC: G01N33/04
- IPC: G01N33/04 ; B05D3/00 ; C23C4/04 ; G01N33/543 ; B82Y40/00 ; C23C24/08 ; B22F7/00 ; B22F1/00 ; B82Y15/00
Abstract:
The invention relates to a method for producing a nanoporous layer on a substrate.
Public/Granted literature
- US20150241418A1 METHOD FOR PRODUCING A NANOPOROUS LAYER ON A SUBSTRATE Public/Granted day:2015-08-27
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