Invention Grant
- Patent Title: Probe card analysis system and method
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Application No.: US13921057Application Date: 2013-06-18
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Publication No.: US09638782B2Publication Date: 2017-05-02
- Inventor: Eric Endres , John T. Strom , Christian Kuwasaki , Christopher McLaughlin
- Applicant: Rudolph Technologies, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R35/00 ; G01R31/28

Abstract:
A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.
Public/Granted literature
- US20140021970A1 PROBE CARD ANALYSIS SYSTEM AND METHOD Public/Granted day:2014-01-23
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