Invention Grant
- Patent Title: Autofocus mechanism
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Application No.: US14315826Application Date: 2014-06-26
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Publication No.: US09638911B2Publication Date: 2017-05-02
- Inventor: Shohei Udo
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2013-138162 20130701
- Main IPC: G02B7/38
- IPC: G02B7/38 ; G02B21/24

Abstract:
An autofocus mechanism includes a light source emitting light through an objective lens at a work piece; a first detector detecting a portion of light reflected by the work piece and generating a first signal; a second detector detecting a portion of the reflected light and generating a second signal; a first amplifier amplifying the first signal and generating a first amplified signal; a second amplifier amplifying the second signal and generating a second amplified signal; an amplification rate definer defining an amplification rate of each of the first amplifier and the second amplifier based on the first amplified signal and the second amplified signal, respectively; and a calculator identifying a focal position of the objective lens based on the first amplified signal and the second amplified signal.
Public/Granted literature
- US20150001373A1 AUTOFOCUS MECHANISM Public/Granted day:2015-01-01
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