Invention Grant
- Patent Title: Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance
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Application No.: US15059757Application Date: 2016-03-03
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Publication No.: US09638914B2Publication Date: 2017-05-02
- Inventor: Satoshi Ito
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-074870 20150401
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00

Abstract:
An electrooptical apparatus includes a torsion hinge (torsion hinge) that has a first opening portion. Around the first opening portion, the opposite side of the torsion hinge to a substrate is in contact with a first connecting portion of a mirror support post that has a tubular shape. A resin that constitutes a sacrificial layer does not remain within the mirror support post. A second end portion of the mirror support post which is at a side opposite the substrate forms a flat plate portion. The second end portion is in contact with a mirror. Therefore, the surface of the mirror does not have any dimple.
Public/Granted literature
- US20160291321A1 ELECTROOPTICAL APPARATUS, PRODUCTION METHOD FOR THE ELECTROOPTICAL APPARATUS, AND ELECTRONIC APPLIANCE Public/Granted day:2016-10-06
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