Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance
Abstract:
An electrooptical apparatus includes a torsion hinge (torsion hinge) that has a first opening portion. Around the first opening portion, the opposite side of the torsion hinge to a substrate is in contact with a first connecting portion of a mirror support post that has a tubular shape. A resin that constitutes a sacrificial layer does not remain within the mirror support post. A second end portion of the mirror support post which is at a side opposite the substrate forms a flat plate portion. The second end portion is in contact with a mirror. Therefore, the surface of the mirror does not have any dimple.
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