Invention Grant

Phase-shift mask
Abstract:
The present invention provides a phase-shift mask comprising a light shading region which is covered by a light shading pattern and a light transmission region which is not covered by the light shading pattern, the light shading pattern comprises a symmetrical part and an asymmetrical part provided outside the symmetrical part, wherein, an optical blocking unit is provided in a part of the light transmission region outside the symmetrical part away from the asymmetrical part, so that intensity of light transmitted through the part of the light transmission region provided with the optical blocking unit is reduced. During an exposure process using the phase-shift mask of the present invention, the obtained exposure intensity is more uniform.
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