Invention Grant
- Patent Title: Phase-shift mask
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Application No.: US14494627Application Date: 2014-09-24
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Publication No.: US09638993B2Publication Date: 2017-05-02
- Inventor: Wusheng Li
- Applicant: BOE TECHNOLOGY GROUP CO., LTD
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg; Scott H. Blackman
- Priority: CN201410163165 20140422
- Main IPC: G03F1/26
- IPC: G03F1/26 ; H01L27/12 ; G03F1/36 ; H01L29/417 ; H01L29/66

Abstract:
The present invention provides a phase-shift mask comprising a light shading region which is covered by a light shading pattern and a light transmission region which is not covered by the light shading pattern, the light shading pattern comprises a symmetrical part and an asymmetrical part provided outside the symmetrical part, wherein, an optical blocking unit is provided in a part of the light transmission region outside the symmetrical part away from the asymmetrical part, so that intensity of light transmitted through the part of the light transmission region provided with the optical blocking unit is reduced. During an exposure process using the phase-shift mask of the present invention, the obtained exposure intensity is more uniform.
Public/Granted literature
- US20150301443A1 PHASE-SHIFT MASK Public/Granted day:2015-10-22
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