Invention Grant
- Patent Title: Resist composition and method for producing resist pattern
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Application No.: US14835408Application Date: 2015-08-25
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Publication No.: US09638996B2Publication Date: 2017-05-02
- Inventor: Tatsuro Masuyama , Takahiro Yasue , Koji Ichikawa
- Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2014-170795 20140825
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/004 ; G03F7/20 ; G03F7/16 ; G03F7/38 ; G03F7/40

Abstract:
A resist composition has a resin which includes a structural unit having an acid-labile group, an acid generator, and a non-ionic compound having a group represented by the formula (a) and having no unsaturated bond: wherein Xa and Xb each independently represent an oxygen atom or a sulfur atom, X1 represents a divalent C1 to C12 saturated hydrocarbon group having a fluorine atom or a C1 to C6 fluorinated alkyl group, and * represents a binding site.
Public/Granted literature
- US20160062234A1 RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN Public/Granted day:2016-03-03
Information query
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