Invention Grant
- Patent Title: Method of making semiconductor device and system for performing the same
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Application No.: US14625147Application Date: 2015-02-18
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Publication No.: US09639647B2Publication Date: 2017-05-02
- Inventor: Chung-Min Fu , Wan-Yu Lo , Chin-Chou Liu , Huan Chi Tseng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method of making a semiconductor device includes determining, by a processor, a first pattern density of a first region, determining a second pattern density of a second region, determining a pattern density gradient from the first region to the second region, determining whether the pattern density gradient exceeds a pattern density gradient threshold and performing a placement or a routing of the semiconductor device if the pattern density gradient is less than or equal to the pattern density gradient threshold.
Public/Granted literature
- US20150161318A1 METHOD OF MAKING SEMICONDUCTOR DEVICE AND SYSTEM FOR PERFORMING THE SAME Public/Granted day:2015-06-11
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