Invention Grant
- Patent Title: Low electric field source erasable non-volatile memory and methods for producing same
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Application No.: US14599370Application Date: 2015-01-16
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Publication No.: US09640403B2Publication Date: 2017-05-02
- Inventor: Der-Tsyr Fan , Chih-Ming Chen , Jung-Chang Lu
- Applicant: Xinnova Technology Limited
- Applicant Address: CN Beijing
- Assignee: Xinnova Technology Ltd.
- Current Assignee: Xinnova Technology Ltd.
- Current Assignee Address: CN Beijing
- Agency: Wang Law Firm, Inc.
- Priority: CN201410064641 20140225
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/423 ; H01L29/66 ; H01L29/788 ; H01L27/11521 ; H01L21/265 ; H01L21/308

Abstract:
A low electric field source erasable non-volatile memory unit includes a substrate having a source diffusion region and a drain diffusion region. The source diffusion region includes a heavily-doped region and a lightly-doped region extending. A first dielectric layer and a tunnel dielectric layer are formed on the substrate. The tunnel dielectric layer includes a lower face contiguous to or partially overlapped with the lightly-doped region of the source diffusion region. A select gate and a floating gate are respectively formed on the first dielectric layer and the tunnel dielectric layer. The floating gate includes a source side edge contiguous to or partially overlapped with the lightly-doped region and misaligned from the heavily-doped region by a distance. A second dielectric layer and a control gate are formed on the floating gate. The control gate and the floating gate are insulating to each other by the second dielectric layer.
Public/Granted literature
- US20150243795A1 Low Electric Field Source Erasable Non-Volatile Memory and Methods for Producing Same Public/Granted day:2015-08-27
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