Invention Grant
- Patent Title: Apparatus, system, and method for handling aligned wafer pairs
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Application No.: US15150856Application Date: 2016-05-10
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Publication No.: US09640418B2Publication Date: 2017-05-02
- Inventor: Hale Johnson , Gregory George
- Applicant: SUSS MicroTec Lithography GmbH
- Applicant Address: DE Garching
- Assignee: SUSS MicroTec Lithography GmbH
- Current Assignee: SUSS MicroTec Lithography GmbH
- Current Assignee Address: DE Garching
- Agency: Hayes Soloway PC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/687 ; H01L21/683 ; H01L23/00

Abstract:
An industrial-scale apparatus, system, and method for handling precisely aligned and centered semiconductor wafer pairs for wafer-to-wafer aligning and bonding applications includes an end effector having a frame member and a floating carrier connected to the frame member with a gap formed therebetween, wherein the floating carrier has a semi-circular interior perimeter. The centered semiconductor wafer pairs are positionable within a processing system using the end effector under robotic control. The centered semiconductor wafer pairs are bonded together without the presence of the end effector in the bonding device.
Public/Granted literature
- US20160336208A1 APPARATUS, SYSTEM, AND METHOD FOR HANDLING ALIGNED WAFER PAIRS Public/Granted day:2016-11-17
Information query
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