Invention Grant
- Patent Title: Monolithic integration techniques for fabricating photodetectors with transistors on same substrate
-
Application No.: US14950902Application Date: 2015-11-24
-
Publication No.: US09640421B2Publication Date: 2017-05-02
- Inventor: Szu-Lin Cheng , Shu-Lu Chen
- Applicant: Artilux, Inc
- Applicant Address: TW Zhubei
- Assignee: ARTILUX, INC.
- Current Assignee: ARTILUX, INC.
- Current Assignee Address: TW Zhubei
- Agency: Perkins Coie LLP
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/113 ; H01L31/062 ; H01L21/70 ; H01L27/144 ; H01L21/8234 ; H01L31/0216 ; H01L29/78 ; H01L31/105 ; H01L31/028 ; H01L21/77 ; H01L31/02 ; H01L31/0232

Abstract:
Examples of the various techniques introduced here include, but not limited to, a mesa height adjustment approach during shallow trench isolation formation, a transistor via first approach, and a multiple absorption layer approach. As described further below, the techniques introduced herein include a variety of aspects that can individually and/or collectively resolve or mitigate one or more traditional limitations involved with manufacturing PDs and transistors on the same substrate, such as above discussed reliability, performance, and process temperature issues.
Public/Granted literature
- US20160148959A1 Monolithic Integration Techniques for Fabricating Photodetectors with Transistors on Same Substrate Public/Granted day:2016-05-26
Information query
IPC分类: