Invention Grant
- Patent Title: Memory device structure and fabricating method thereof
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Application No.: US15180508Application Date: 2016-06-13
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Publication No.: US09640432B2Publication Date: 2017-05-02
- Inventor: Jinshuang Zhang , Shaobin Li , Sheng-Fen Chiu
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201510325294 20150612
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L21/768 ; H01L27/11521 ; H01L27/11526

Abstract:
The disclosed subject matter provides a memory device structure and a fabricating method thereof. The memory device structure includes a substrate including a device region and a peripheral region; multiple gate structures; a first dielectric layer, a second barrier layer, multiple source interconnecting lines, and multiple drain region plugs; a second dielectric layer in the device region include multiple source line plugs, and multiple second drain region plugs, and multiple controlling gate plugs; a third dielectric layer including multiple first conductive layers; a fourth dielectric layer including multiple interconnecting structures; a fifth dielectric layer including multiple second conductive layers; and a sixth dielectric layer including multiple third conductive layers.
Public/Granted literature
- US20160365313A1 MEMORY DEVICE STRUCTURE AND FABRICATING METHOD THEREOF Public/Granted day:2016-12-15
Information query
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