Invention Grant
- Patent Title: Integrated circuits with inactive gates and methods of manufacturing the same
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Application No.: US14585250Application Date: 2014-12-30
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Publication No.: US09640438B2Publication Date: 2017-05-02
- Inventor: Ming Zhu , Yiang Aun Nga
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopz, LLP
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L21/8234 ; H01L29/66 ; H01L21/321 ; H01L27/088 ; H01L21/28 ; H01L29/49 ; H01L21/8238

Abstract:
Integrated circuits and methods for manufacturing the same are provided. A method for producing an integrated circuit includes forming a first active dummy gate, a second active dummy gate, and an inactive gate overlying a substrate. The first active dummy gate is replaced with a first metal gate, where replacing the first active dummy gate includes planarizing the first metal gate, the second active dummy gate, and the inactive gate. The second active dummy gate is replaced with a second replacement metal after the first active dummy gate was replaced, where the inactive gate remains overlying the substrate.
Public/Granted literature
- US20160190012A1 INTEGRATED CIRCUITS WITH INACTIVE GATES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-06-30
Information query
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