Invention Grant
- Patent Title: Lateral-diode, vertical-SCR hybrid structure for high-level ESD protection
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Application No.: US14847249Application Date: 2015-09-08
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Publication No.: US09640523B2Publication Date: 2017-05-02
- Inventor: Xiaowu Cai , Beiping Yan , Zhongzi Chen
- Applicant: Hong Kong Applied Science & Technology Research Institute Company Limited
- Applicant Address: HK Hong Kong
- Assignee: Hong Kong Applied Science and Technology Research Institute Company Limited
- Current Assignee: Hong Kong Applied Science and Technology Research Institute Company Limited
- Current Assignee Address: HK Hong Kong
- Agency: gPatent LLC
- Agent Stuart T. Auviney
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L29/74 ; H01L29/749

Abstract:
A lateral p-n diode in the center of and surrounded by a vertical Silicon-Controlled Rectifier (SCR) forms an Electro-Static-Discharge (ESD) protection structure. The lateral p-n diode has a cross-shaped P+ diode tap with four rectangles of N+ diode regions in each corner of the cross. A P-well under the P+ diode tap is also an anode of a vertical PNPN SCR that has a deep N-well in a P-substrate. The deep N-well surrounds the lateral diode. Triggering MOS transistors are formed just beyond the four ends of the cross shaped P+ diode tap. Each triggering MOS transistor has N+ regions at the edge of the deep N-well and in the P-substrate that act as the cathode terminals. A deep P+ implant region under the N+ region at the edge of the deep N-well decreases a trigger voltage of the vertical SCR.
Public/Granted literature
- US20170069616A1 Lateral-Diode, Vertical-SCR Hybrid Structure for High-Level ESD Protection Public/Granted day:2017-03-09
Information query
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