Invention Grant
- Patent Title: HV complementary bipolar transistors with lateral collectors on SOI with resurf regions under buried oxide
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Application No.: US14219760Application Date: 2014-03-19
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Publication No.: US09640611B2Publication Date: 2017-05-02
- Inventor: Alexei Sadovnikov , Jeffrey A. Babcock
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Tuenlap D. Chan; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L29/732
- IPC: H01L29/732 ; H01L27/082 ; H01L29/00 ; H01L29/06 ; H01L27/12 ; H01L29/08 ; H01L29/66 ; H01L29/10

Abstract:
Complementary high-voltage bipolar transistors in silicon-on-insulator (SOI) integrated circuits is disclosed. In one disclosed embodiment, a collector region is formed in an epitaxial silicon layer disposed over a buried insulator layer. A base region and an emitter are disposed over the collector region. An n-type region is formed under the buried insulator layer (BOX) by implanting donor impurity through the active region of substrate and BOX into a p-substrate. Later in the process flow this n-type region is connected from the top by doped poly-silicon plug and is biased at Vcc. In this case it will deplete lateral portion of PNP collector region and hence, will increase its BV.
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