Invention Grant
- Patent Title: Transistors having strained channel under gate in a recess
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Application No.: US14245092Application Date: 2014-04-04
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Publication No.: US09640656B2Publication Date: 2017-05-02
- Inventor: Satoru Mayuzumi , Mark Fischer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/105 ; H01L29/08 ; H01L29/165 ; H01L29/423 ; H01L29/66 ; H01L29/10 ; H01L27/088 ; H01L29/267 ; H01L27/108

Abstract:
Some embodiments include a construction having a second semiconductor material over a first semiconductor material. A region of the second semiconductor material proximate the first semiconductor material has strain due to different lattice characteristics of the first and second semiconductor materials. A transistor gate extends downwardly into the second semiconductor material. Gate dielectric material is along sidewalls and a bottom of the transistor gate. Source/drain regions are along the sidewalls of the transistor gate, and the gate dielectric material is between the source/drain regions and the transistor gate. A channel region extends between the source/drain regions and is under the bottom of the transistor gate. At least some of the channel region is within the strained region.
Public/Granted literature
- US20150287825A1 Transistors Public/Granted day:2015-10-08
Information query
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