Invention Grant
- Patent Title: Semiconductor device
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Application No.: US14809896Application Date: 2015-07-27
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Publication No.: US09640657B2Publication Date: 2017-05-02
- Inventor: Qiuhua Han
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN2013-1-0011741 20130111
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/165 ; H01L29/16 ; H01L29/66 ; H01L29/10

Abstract:
Semiconductor devices and fabrication methods are provided. In an exemplary method, a semiconductor layer including a first opening can be provided. The first opening can be filled with a stress material. The stress material can then be etched to form a second opening having a width less than a width of the first opening to leave a stress material layer in the semiconductor layer and on each sidewall of the second opening. The semiconductor layer can be etched to form a fin structure on a sidewall surface of the stress material layer. A main gate structure can be formed on the sidewall surface of the fin structure. A back gate structure can be formed on the sidewall surface of the stress material layer.
Public/Granted literature
- US20150333179A1 SEMICONDUCTOR DEVICE Public/Granted day:2015-11-19
Information query
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