Invention Grant
- Patent Title: Method of manufacturing a low noise photodiode
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Application No.: US14919130Application Date: 2015-10-21
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Publication No.: US09640701B2Publication Date: 2017-05-02
- Inventor: Olivier Gravrand , Johan Rothman
- Applicant: Commissariat a L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1402360 20141021
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/00 ; H01L31/103 ; H01L31/18 ; H01L21/266 ; H01L31/0296 ; H01L31/0304 ; H01L31/0352 ; H01L21/425

Abstract:
A method of manufacturing a photodiode including a useful layer made of a semi-conductor alloy. The useful layer has a band gap value which decreases from its upper face to its lower face. A step of producing a first doped region forming a PN junction with a second doped region of the useful layer, said production of a first doped region including a first doping step, so as to produce a base portion; and a second doping step, so as to produce at least one protuberance protruding from the base portion and in the direction of the lower face.
Public/Granted literature
- US20160111580A1 METHOD OF MANUFACTURING A LOW NOISE PHOTODIODE Public/Granted day:2016-04-21
Information query
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