Invention Grant
- Patent Title: Piezoelectric/electrostrictive element and method for manufacturing the same
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Application No.: US14190586Application Date: 2014-02-26
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Publication No.: US09640749B2Publication Date: 2017-05-02
- Inventor: Shinya Takemura , Takashi Ebigase , Kenichi Tsuge
- Applicant: NGK Insulators, Ltd. , NGK Ceramic Device Ltd.
- Applicant Address: JP Nagoya JP Komaki-Shi
- Assignee: NGK Insulators, Ltd.,NGK Ceramic Device Ltd.
- Current Assignee: NGK Insulators, Ltd.,NGK Ceramic Device Ltd.
- Current Assignee Address: JP Nagoya JP Komaki-Shi
- Agency: Burr & Brown, PLLC
- Priority: JP2013-070897 20130329
- Main IPC: H01L41/047
- IPC: H01L41/047 ; B41J2/16 ; H01L41/09 ; H01L41/29

Abstract:
A piezoelectric/electrostrictive element having a piezoelectric body, a through-hole electrode, a first electrode, a second electrode, a third electrode. The piezoelectric body includes a through-hole in communication with a first main surface and a second main surface. The through-hole electrode is formed on an inner side surface of the through-hole. The first electrode is formed on the first main surface of the piezoelectric body, and connected to the through-hole electrode. The second electrode is formed on the second main surface of the piezoelectric body, and is connected to the through-hole electrode. The third electrode is formed on the second main surface of the piezoelectric body and isolated from the second electrode. A calculated average roughness in the inner side surface is larger than 0.11 microns and smaller than 16 microns. A maximum height roughness in the inner side surface is larger than 0.2 microns and smaller than 20 microns.
Public/Granted literature
- US20140292159A1 PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-10-02
Information query
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