- Patent Title: Acoustic wave device with suppressed higher order transverse modes
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Application No.: US14708762Application Date: 2015-05-11
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Publication No.: US09640750B2Publication Date: 2017-05-02
- Inventor: Hidekazu Nakanishi , Hiroyuki Nakamura , Tetsuya Tsurunari , Joji Fujiwara
- Applicant: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD
- Applicant Address: JP Kadoma-Shi
- Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee Address: JP Kadoma-Shi
- Agency: Lando & Anastasi, LLP
- Priority: JP2011-068857 20110325
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H03H9/54 ; H01L41/047 ; H03H9/02

Abstract:
In an acoustic wave device, an unnecessary high-order transverse mode wave is suppressed. The acoustic wave device includes a piezoelectric substrate, at least one pair of interdigital transducer (IDT) electrodes formed on the piezoelectric substrate, and a dielectric film which covers at least a part of the piezoelectric substrate and the IDT electrodes. The IDT electrodes each have a plurality of electrode fingers interleaved with each other. An acoustic velocity of an acoustic wave in the area in which the electrode fingers are interleaved with each other is greater than an acoustic velocity of an acoustic wave in an edge area including end portions of the electrode fingers.
Public/Granted literature
- US20150243873A1 ACOUSTIC WAVE DEVICE WITH SUPPRESSED HIGHER ORDER TRANSVERSE MODES Public/Granted day:2015-08-27
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