Invention Grant
- Patent Title: Integrated CMOS/MEMS microphone die components
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Application No.: US14707487Application Date: 2015-05-08
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Publication No.: US09641950B2Publication Date: 2017-05-02
- Inventor: Peter V. Loeppert , Sung Lee
- Applicant: Knowles Electronics LLC
- Applicant Address: US IL Itasca
- Assignee: Knowles Electronics, LLC
- Current Assignee: Knowles Electronics, LLC
- Current Assignee Address: US IL Itasca
- Agency: Foley & Lardner LLP
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; H04R7/10 ; B81B3/00

Abstract:
A die is manufactured using complementary metal-oxide semiconductor (CMOS) techniques to create transistors, electrical pathways, and microelectromechanical system (MEMS) structures. The MEMS structures include springs, plates, mechanical stops, and structural supports, which can be combined to form complex MEMS structures including microphones, pressure sensors, accelerometers, resonators, gyroscopes, and the like.
Public/Granted literature
- US20160060101A1 Integrated CMOS/MEMS Microphone Die Components Public/Granted day:2016-03-03
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