Invention Grant
- Patent Title: Micro-electro-mechanical systems (MEMS) and corresponding manufacturing process
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Application No.: US13841273Application Date: 2013-03-15
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Publication No.: US09642244B2Publication Date: 2017-05-02
- Inventor: Fulvio Vittorio Fontana
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: ITMI2008A2322 20081224
- Main IPC: B01L3/14
- IPC: B01L3/14 ; H05K1/02 ; B01L3/00 ; H05K3/30 ; H05K1/18

Abstract:
An embodiment of a micro-electro-mechanical system of the MEMS type comprising at least one micro-electro-mechanical device of the MEMS type and one junction with a duct suitable to being associated with an external apparatus. Said junction being a printed circuit board PCB comprising at least two layers with juxtaposed faces, a channel being present in at least one face of at least one of said at least two layers suitable for realizing the duct with the juxtaposition of the other face of at least another one of at least two layers.
Public/Granted literature
- US20130276896A1 MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) AND CORRESPONDING MANUFACTURING PROCESS Public/Granted day:2013-10-24
Information query
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