Invention Grant
- Patent Title: Membrane sheet with bumps for probe card, probe card and method for manufacturing membrane sheet with bumps for probe card
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Application No.: US14128111Application Date: 2012-12-04
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Publication No.: US09642255B2Publication Date: 2017-05-02
- Inventor: Toshio Tago , Masaaki Ishizaka
- Applicant: Elfinote Technology Corporation
- Applicant Address: JP Yokohama-Shi, Kanagawa
- Assignee: Elfinote Technology Corporation
- Current Assignee: Elfinote Technology Corporation
- Current Assignee Address: JP Yokohama-Shi, Kanagawa
- Agency: Andrus Intellectual Property Law, LLP
- Priority: JP2011-266983 20111206
- International Application: PCT/JP2012/081364 WO 20121204
- International Announcement: WO2013/084874 WO 20130613
- Main IPC: H05K1/11
- IPC: H05K1/11 ; G01R1/073 ; G01R1/04 ; H05K3/42 ; G01R1/067

Abstract:
A probe card is for testing a wafer which allows for stable contact with electrode pads of a wafer simultaneously under small contact pressure in wafer test procedures. A probe card includes a frame plate which is provided with a plurality of through-holes corresponding to semiconductor chips of a wafer, a wiring substrate, an anisotropic conductive membrane which has a size corresponding to that of the through-hole and is fixed in the through-hole or on a periphery of the through-hole in the frame plate, and a contact membrane which also has a size corresponding to that of the through-hole and is fixed on the periphery of the through-hole in the frame plate. The contact membrane includes an insulating membrane, a conductive electrode provided in the insulating membrane and on a reverse face of the insulating membrane, and a bump. The bump is formed by plating an upper end of an electrode body which is exposed by half-etching the insulating membrane. The bump has a pointy tip end portion is electrically contacted with a terminal in the wiring substrate via a conductive path in the anisotropic conductive membrane.
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